<b id="yfvhu"><address id="yfvhu"></address></b>
  1. <table id="yfvhu"><acronym id="yfvhu"><thead id="yfvhu"></thead></acronym></table>
  2. <source id="yfvhu"><td id="yfvhu"><output id="yfvhu"></output></td></source>

      [1]谷金鑫,魏航,任飛飛,等.高能脈沖磁控濺射技術制備VO2薄膜研究進展[J].哈爾濱工程大學學報,2020,41(2):219-226.[doi:10.11990/jheu.201911016]
       GU Jinxin,WEI Hang,REN Feifei,et al.Recent progress on the preparation of VO2 thin films by high-power impulse magnetron sputtering technology[J].hebgcdxxb,2020,41(2):219-226.[doi:10.11990/jheu.201911016]
      點擊復制

      高能脈沖磁控濺射技術制備VO2薄膜研究進展(/HTML)
      分享到:

      《哈爾濱工程大學學報》[ISSN:1006-6977/CN:61-1281/TN]

      卷:
      41
      期數:
      2020年2期
      頁碼:
      219-226
      欄目:
      出版日期:
      2020-02-05

      文章信息/Info

      Title:
      Recent progress on the preparation of VO2 thin films by high-power impulse magnetron sputtering technology
      作者:
      谷金鑫1 魏航2 任飛飛2 李龍2 范青潽2 趙九蓬1 豆書亮2 李垚2
      1. 哈爾濱工業大學 化工與化學學院, 黑龍江 哈爾濱 150001;
      2. 哈爾濱工業大學 復合材料與結構研究所, 黑龍江 哈爾濱 150001
      Author(s):
      GU Jinxin1 WEI Hang2 REN Feifei2 LI Long2 FAN Qingpu2 ZHAO Jiupeng1 DOU Shuliang2 LI Yao2
      1. School of Chemistry and Chemical Engineering, Harbin Institute of Technology, Harbin 150001, China;
      2. Center for Composite Materials and Structure, Harbin Institute of Technology, Harbin 150001, China
      關鍵詞:
      二氧化釩熱致變色透過光譜相變特性高能脈沖磁控濺射放電特性沉積溫度
      分類號:
      TB381
      DOI:
      10.11990/jheu.201911016
      文獻標志碼:
      A
      摘要:
      高能脈沖磁控濺射(HiPIMS)技術具有低占空比盛兴娱乐登陆、低頻率、高峰值功率密度盛兴娱乐登陆、高濺射等離子體密度等特點盛兴娱乐登陆,能夠在高峰值功率下進行薄膜沉積盛兴娱乐登陆,從而提高薄膜的沉積質量盛兴娱乐登陆。將高能脈沖磁控濺射技術用于二氧化釩(VO2)薄膜的沉積,能夠降低其制備溫度,提高致密度。本文介紹了高能脈沖磁控濺射技術的特點,闡述了高能脈沖磁控濺射技術制備VO2熱致變色材料的研究現狀,最后總結了利用高能脈沖磁控濺射技術制備VO2薄膜的優勢以及存在的問題并對其應用進行展望。

      參考文獻/References:

      [1] FORTIER J P, BALOUKAS B, ZABEIDA O, et al. Thermochromic VO2 thin films deposited by HiPIMS[J]. Solar energy materials and solar cells, 2014, 125:291-296.
      [2] 左瀟, 孫麗麗, 汪愛英, 等. 高功率脈沖磁控濺射制備非晶碳薄膜研究進展[J]. 表面技術, 2019, 48(9):53-63.ZUO Xiao, SUN Lili, WANG Aiying, et al. Research progress on preparation of amorphous carbon thin films by high power impulse magnetron sputtering[J]. Surface technology, 2019, 48(9):53-63.
      [3] 李春偉, 田修波, 宋煒昱, 等. 工作參數對磁場增強高功率脈沖磁控濺射放電特性的影響[J]. 真空科學與技術學報, 2018, 38(4):264-271.LI Chunwei, TIAN Xiubo, SONG Weiyu, et al. Effect of synthesis conditions on discharge behavior of magnetic field enhanced high power impulse magnetron sputtering[J]. Chinese journal of vacuum science and technology, 2018, 38(4):264-271.
      [4] OLEJNÍ?EK J, HUBI?KA Z, KMENT ?, et al. Investigation of reactive HiPIMS+MF sputtering of TiO2 crystalline thin films[J]. Surface and coatings technology, 2013, 232:376-383.
      [5] ZHAO Xiaoli, JIN Jie, CHENG J C, et al. Structural and optical properties of zirconia thin films deposited by reactive high-power impulse magnetron sputtering[J]. Thin solid films, 2014, 570:404-411.
      [6] ZUBKINS M, ARSLAN H, BIKSE L, et al. High power impulse magnetron sputtering of Zn/Al target in an Ar and Ar/O2 atmosphere:the study of sputtering process and AZO films[J]. Surface and coatings technology, 2019, 369:156-164.
      [7] WANG Lei, JIN Jie, ZHU Chengke, et al. Effects of HiPIMS pulse-length on plasma discharge and on the properties of WC-DLC coatings[J]. Applied surface science, 2019, 487:526-538.
      [8] LOQUAI S, BALOUKAS B, ZABEIDA O, et al. HiPIMS-deposited thermochromic VO2 films on polymeric substrates[J]. Solar energy materials and solar cells, 2016, 155:60-69.
      [9] KOLENATY D, HOUSKA J, VLCEK J. Improved performance of thermochromic VO2/SiO2 coatings prepared by low-temperature pulsed reactive magnetron sputtering:prediction and experimental verification[J]. Journal of alloys and compounds, 2018, 767:46-51.
      [10] MORIN F J. Oxides which show a metal-to-insulator transition at the Neel temperature[J]. Physical review letters, 1959, 3(1):34-36.
      [11] DOU Shuliang, ZHANG Weiyan, WANG Yuemin, et al. A facile method for the preparation of w-doped VO2 films with lowered phase transition temperature, narrowed hysteresis loops and excellent cycle stability[J]. Materials chemistry and physics, 2018, 215:91-98.
      [12] DOU Shuliang, WANG Yi, ZHANG Xiang, et al. Facile preparation of double-sided VO2 (M) films with micro-structure and enhanced thermochromic performances[J]. Solar energy materials and solar cells, 2017, 160:164-173.
      [13] DOU Shuliang, ZHANG Weiyan, WANG Yuemin, et al. The influence of temperature on preparing tungsten doped vanadium dioxide films by sol-gel method[J]. Materials research express, 2018, 6(1):016408.
      [14] CAVALLERI A, TÓTh C, SIDERS C W, et al. Femtosecond structural dynamics in VO2 during an ultrafast solid-solid phase transition[J]. Physical review letters, 2001, 87(23):237401.
      [15] SUN Kai, RIEDEL C A, URBANI A, et al. VO2 thermochromic metamaterial-based smart optical solar reflector[J]. ACS photonics, 2018, 5(6):2280-2286.
      [16] SARAKINOS K, ALAMI J, KONSTANTINIDIS S. High power pulsed magnetron sputtering:a review on scientific and engineering state of the art[J]. Surface and coatings technology, 2010, 204(11):1661-1684.
      [17] LOQUAI S, BALOUKAS B, KLEMBERG-SAPIEHA J E, et al. HiPIMS-deposited thermochromic VO2 films with high environmental stability[J]. Solar energy materials and solar cells, 2017, 160:217-224.
      [18] ZHANG Haibao, CHERNG J S, CHEN Qiang. Recent progress on high power impulse magnetron sputtering (HiPIMS):the challenges and applications in fabricating VO2 thin film[J]. AIP advances, 2019, 9(3):035242.
      [19] LUNDIN D, SARAKINOS K. An introduction to thin film processing using high-power impulse magnetron sputtering[J]. Journal of materials research, 2012, 27(5):780-792.
      [20] EHIASARIAN A P. High-power impulse magnetron sputtering and its applications[J]. Pure and applied chemistry, 2010, 82(6):1247-1258.
      [21] 艾猛, 李劉合, 韓明月, 等. 高功率脈沖磁控濺射等離子體放電特性研究現狀[J]. 表面技術, 2018, 47(9):176-186.AI Meng, LI Liuhe, HAN Mingyue, et al. Discharge characteristics of plasma made by high power pulse magnetron sputtering[J]. Surface technology, 2018, 47(9):176-186.
      [22] BRÄUER G, SZYSZKA B, VERGÖHL M, et al. Magnetron sputtering-milestones of 30 years[J]. Vacuum, 2010, 84(12):1354-1359.
      [23] KOUZNETSOV V, MACÁK K, SCHNEIDER J M, et al. A novel pulsed magnetron sputter technique utilizing very high target power densities[J]. Surface and coatings technology, 1999, 122(2/3):290-293.
      [24] BARKER P M, KONSTANTINIDIS S, LEWIN E, et al. An investigation of c-HiPIMS discharges during titanium deposition[J]. Surface and coatings technology, 2014, 258:631-638.
      [25] LIN Tiegui, WANG Langping, WANG Xiaofeng, et al. Influence of bias voltage on microstructure and phase transition properties of VO2 thin film synthesized by HiPIMS[J]. Surface and coatings technology, 2016, 305:110-115.
      [26] AIJAZ A, JI Yuxia, MONTERO J, et al. Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering[J]. Solar energy materials and solar cells, 2016, 149:137-144.
      [27] YUAN Xun, ZHANG Yubo, ABTEW T A, et al. VO2:orbital competition, magnetism, and phase stability[J]. Physical review B, 2012, 86(23):235103.
      [28] GAO Yanfeng, LUO Hongjie, ZHANG Zongtao, et al. Nanoceramic VO2 thermochromic smart glass:a review on progress in solution processing[J]. Nano energy, 2012, 1(2):221-246.
      [29] 羅明海, 徐馬記, 黃其偉, 等. VO2金屬-絕緣體相變機理的研究進展[J]. 物理學報, 2016, 65(4):047201.LUO Minghai, XU Maji, HUANG Qiwei, et al. Research progress of metal-insulator phase transition mechanism in VO2[J]. Acta physica sinica, 2016, 65(4):047201.
      [30] 豆書亮. 溶膠-凝膠法制備二氧化釩薄膜及其光譜性能研究[D]. 哈爾濱:哈爾濱工業大學, 2014.DOU Shuliang, Preparation and optical performance of vanadium dioxide by sol-gel method[D]. Harbin:Harbin Institute of Technology, 2014.
      [31] KIM H T, LEE Y W, KIM B J, et al. Monoclinic and correlated metal phase in VO2 as evidence of the Mott transition:coherent phonon analysis[J]. Physical review letters, 2006, 97(26):266401.
      [32] KIM S, KIM K, KANG C J, et al. Correlation assisted phonon softenings and the mott-peierls transition in VO2[J]. arXiv:1207.1770, 2012.
      [33] AETUKURI N B, GRAY A X, DROUARD M, et al. Control of the metal-insulator transition in vanadium dioxide by modifying orbital occupancy[J]. Nature physics, 2013, 9(10):661-666.
      [34] 林鐵貴. VO2薄膜的HiPIMS制備工藝與相變溫度調控機理研究[D]. 哈爾濱:哈爾濱工業大學, 2017.LIN Tiegui. Study on HIPIMS preparation technology and phase transition temperature adjusting mechanism of VO2 film[D]. Harbin:Harbin Institute of Technology, 2017.
      [35] VL?EK J, KOLENATÝ D, HOU?KA J, et al. Controlled reactive HiPIMS-effective technique for low-temperature (300℃) synthesis of VO2 films with semiconductor-to-metal transition[J]. Journal of physics D:applied physics, 2017, 50(38):38LT01.
      [36] HOU?KA J, KOLENATÝ D, REZEK J, et al. Characterization of thermochromic VO2 (prepared at 250℃) in a wide temperature range by spectroscopic ellipsometry[J]. Applied surface science, 2017, 421:529-534.
      [37] LIN Tiegui, WANG Langping, WANG Xiaofeng, et al. Influence of bias voltage on microstructure and phase transition properties of VO2 thin film synthesized by HiPIMS[J]. Surface and coatings technology, 2016, 305:110-115.
      [38] LIN Tiegui, ZHANG Yufen, ZHENG Decong. The ultrathin VO2(M) film with ultrahigh visible transmittance synthesized on the quartz glass substrate by HiPIMS[J]. Vacuum, 2018, 156:449-455.
      [39] MURAOKA Y, HIROI Z. Metal-insulator transition of VO2 thin films grown on TiO2(001) and (110) substrates[J]. Applied physics letters, 2002, 80(4):583-585.
      [40] MLYUKA N R, NIKLASSON G A, GRANQVIST C G. Thermochromic multilayer films of VO2 and TiO2 with enhanced transmittance[J]. Solar energy materials and solar cells, 2009, 93(9):1685-1687.
      [41] JUAN Pichun, LIN K C, LIN CHENGLI, et al. Low thermal budget annealing for thermochromic VO2 thin films prepared by high power impulse magnetron sputtering[J]. Thin solid films, 2019, 687:137443.
      [42] ZONG Haitao, GENG Chenchen, ZHANG Cong, et al. Tuning the electrical and optical properties of ZrxOy/VO2 thin films by controlling the stoichiometry of ZrxOy buffer layer[J]. Applied surface science, 2019, 487:138-145.
      [43] CHANG Tianci, CAO Xun, DEDON L R, et al. Optical design and stability study for ultrahigh-performance and long-lived vanadium dioxide-based thermochromic coatings[J]. Nano energy, 2018, 44:256-264.
      [44] HOUSKA J, KOLENATY D, VLCEK J, et al. Significant improvement of the performance of ZrO2/V1-xWxO2/ZrO2 thermochromic coatings by utilizing a second-order interference[J]. Solar energy materials and solar cells, 2019, 191:365-371.

      備注/Memo

      備注/Memo:
      收稿日期:2019-11-07。
      基金項目:國家自然科學基金項目(51572058,51902073);中央高盛兴娱乐登陆;究蒲袠I務費專項基金(HIT.NSRIF.2020019);裝備發展部領域基金(6140922010901)盛兴娱乐登陆;中國博士后科學基金項目(2019M661273);黑龍江省博士后科學基金(LBH-Z19159).
      作者簡介:谷金鑫,女,博士研究生;豆書亮,男,師資博士后;李垚,男,教授,博士生導師,長江學者特聘教授.
      通訊作者:豆書亮,E-mail:dousl@hit.edu.cn.
      更新日期/Last Update: 2020-03-24
      盛兴娱乐登陆